PDT 2. Page 3 Edwards and the Edwards logo are trademarks of Edwards Limited. LON module connection 4. Emergency stop fuse holder F9 9. Electrical supply connection 5. Page Top View Of Pump 6. Alarm LED red 2. Running LED green 7. Warning LED amber 3. Page 5 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 12 A Issue D This page has been intentionally left blank. Page 9 Edwards and the Edwards logo are trademarks of Edwards Limited. Page Connections D type way plug External emergency stop switch 24 V a.
Page 11 Edwards and the Edwards logo are trademarks of Edwards Limited. Only Edwards engineers may install the dry pumping system. Users can be trained by Edwards to conduct the tasks described in this manual, contact your local service centre or Edwards for more information.
Page Lubrication Ensure that all components in the vacuum pipeline have a maximum pressure rating which is greater than the highest pressure that can be generated in your system. Page 15 Edwards and the Edwards logo are trademarks of Edwards Limited.
Page Connect The IhHtx Exhaust Tms A Issue D Incorporate flexible pipelines in the vacuum pipeline to reduce the transmission of vibration and to prevent loading of coupling-joints. We recommend that you use Edwards braided flexible pipelines. Page Connect The Nitrogen Supply limiting oxidant concentration.
P or contact Edwards: refer to the address page at the rear of this manual for details of your nearest Edwards company. Page Gas Purges Do not connect voltages greater than 30 V a. If you do, the interface control will not provide protection against electric shock. Contact your supplier or Edwards if you wish to use the iH system with a power supply in a different voltage range to that specified on the rating plate. Cover 4. Common cable 2. Screw 2 off 5. Voltage select cable 3. Electrics box 6.
Edwards recommend that the electrical supply be connected to a suitable isolator, which is easily accessible for maintenance and clearly identified.
If you need further information on connecting the electrical supply, look it up on the Web using URL at the start of manual, or contact your supplier or Edwards for advice. Page 28 refer to Section 7. On iH80, and systems, we recommend that you fit a second protective earth ground conductor to the protective earth ground stud on the Electrics Box Figure 3, item 1 and connect the other end of this conductor to your factory earth ground.
The emergency stop control must be compliant with IEC This should be a red self latching mushroom push button on a yellow background. Page 23 Edwards and the Edwards logo are trademarks of Edwards Limited.
Refer to the individual accessories manuals for information about installation. Page Commission The System Figure 6, item 3 goes on. Switch on the cooling-water and nitrogen supplies. Ensure that the exhaust-extraction system is not blocked for example, that valves in the exhaust-extraction system are open.
Page Install Additional Safety Equipment 4. You must ensure that your installation remains safe if the iH system shuts down automatically. Control must be taken with the iTIM. Page 27 Edwards and the Edwards logo are trademarks of Edwards Limited. Page Status Indicators If the pump is not going to be required for some time, switch off the electrical supply and the cooling-water supply. Page Automatic Shut-Down The decision on whether or not to shutdown the pump is left with the tool.
If the iH system has an unplanned shutdown, ensure that the cause of the shutdown is identified and rectified before restarting. Alternatively, you can use your process tool or other control equipment to control the operation of the iH system through an Interface Module or through an iM Communications Module accessory or you can use the iH Single Equipment Monitor accessory to control the operation of the iH system.
Features and Benefits Optimized utilities consumption. No preventative maintenance required. Cantilevered shafts and specially profiled rotors for better handling of particles. Reserve motor power also maximizes reliability on harsh-duty CVD applications. Corrosion resistant materials allow pumping of corrosive gases.
Higher operating temperatures provide ample margin to prevent gas condensation. The one-piece shaft eliminates the need for a motor coupling and a fifth pumping stage removes the need for a silencer and eliminates particle accumulation, both reducing the overall footprint.
Technical Data 50 Hz 60 Hz Peak Speed 86 m 3 h -1 m 3 h -1 51 cfm 61 cfm l min -1 l min -1 Ultimate Vacuum 3 x 10 -2 mbar 1 x 10 -2 mbar 2.
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